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USG
(redirected from Undoped Silicate Glass)

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AcronymDefinition
USGUniversity System of Georgia
USGUndergraduate Student Government
USGUnited States Government
USGUnited States Gypsum
USGUnder Secretary General
USGUltrasonography
USGUlysses S. Grant (president and general)
USGUrine Specific Gravity
USGUnix Support Group
USGUtrecht School of Governance (Netherlands)
USGUNIX Security Guards (hacker group)
USGUnited States Gulf (of Mexico)
USGUndoped Silicate Glass
USGUnited States Gallon
USGUniversal Security Group (Microsoft)
USGUrea Supergranule
USGUnix Security Guard (pro-Islamic hacking group)
USGUrban Social Geography
USGUnión Solidarista Guatemalteca (Guatemalan Solidarity Union)
USGUnited States Gauge (Sprint)
USGUniversities of Shady Grove (Maryland)
USGl'Union Socialiste de Gabonaise (Gabonese Socialist Union; political party)
USGUndoped Silica Glass
USGUtilities Solutions Group
USGUnified Security Gateway (computing)


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Featuring a flexible "universal" chamber design and innovative gap-fill technology, the Ultima supports multiple interconnect and front-end HDP-CVD applications, including fluorinated silicate glass (FSG) and undoped silicate glass (USG) for inter-metal dielectric (IMD) deposition, as well as USG for shallow trench isolation (STI) and phosphosilicate glass (PSG) for pre-metal dielectric deposition (PMD).
Acronyms spelled out at end of document *HDP-CVD: high-density plasma-chemical vapor deposition STI: shallow trench isolation IMD: inter-metal dielectric DARC: dielectric anti-reflective coating USG: undoped silicate glass FSG: fluorinated silicate glass
Samsung will use the systems in a new fab expansion to deposit undoped silicate glass (USG) and borophosphosilicate glass (BPSG) dielectric films for shallow trench isolation (STI) and premetal dielectric (PMD) gap-fill applications.
 
 
 
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