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The apparatus is easily handled by anyone, and enables nanometer-scale fabrication at low cost, which until now could only be done with expensive large apparatus using short wavelength light, such as vacuum ultraviolet light (for the photolithography method) and electron beams (for the Gietzen, The NIST FT700 vacuum ultraviolet Fourier transform spectrometer: applications in ultraviolet spectrometry and radiometry, in Ultraviolet Atmospheric and Space Remote Sensing: Methods and Instrumentation II. NIST scientists have constructed and characterized a probe that is suitable for making accurate measurements of irradiance in the vacuum ultraviolet spectral region. |
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