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The experiments included lithography checks for Minimum Width (Pinching), Minimum Space (Bridging), Minimum Area Overlap, and Process Variability Index. Calibre LFD also calculates a Design Variability Index, or DVI(TM), as a way to measure how resilient the design is to process variations; a lower DVI value represents a more resilient design. Based on these calculations, the percent deviation from best possible control is reported as a variability index. |
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