WAXRD

AcronymDefinition
WAXRDWide Angle X-Ray Diffraction
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1A and B, the WAXRD patterns revealed the (001) diffraction peaks at (2[theta] = 5.
New WAXRD (Wide Angle X-ray diffraction)configuration is targeting metrology of advanced metallization structures with in-line capabilities of monitoring grain size, texture and phase of the seed/barrier and Cu or W metal structures.
WAXRD patterns of pure DBSA-PANI and DBSA-PANI doped with different content of m-cresol are shown in Fig.