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WCVD |
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Tower Semiconductor's order specified multiple PVD (physical vapor deposition), RTP (rapid thermal processing), etch, HDP-CVD (high-density plasma chemical vapor deposition), WCVD (tungsten chemical vapor deposition), SACVD (sub-atmospheric chemical vapor deposition), wafer inspection and defect review systems. GPS' order includes Applied Materials' Precision Implant 9500 xR system and the Precision 5000 WCVD system with the latest "xZ" chamber technology. |
WCVD |
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