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WIWNU

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AcronymDefinition
WIWNUWithin-Wafer-Nonuniformity


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SpeedFam-IPEC's tunable Hexazone(TM) carrier technology and an innovative within-wafer non-uniformity (WIWNU) optimizer allow for simultaneous optimization of WIWNU (less than 3 percent with 3-mm exclusion) and within-die non-uniformity (WIDNU) on a single polyurethane pad.
SpeedFam-IPEC Releases Suite of CMP Processes That Exceed 0.13um ... by Business Wire
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