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The AL3300 provides a throughput up to 180 wafers per hour in a small, flexible configuration footprint that can be configured to match any factory floor layout. 6-nm single-machine overlay and 131 wafers per hour productivity. The small-footprint Mentor is capable of throughputs of 60 wafers per hour to enable nanotechnology mass measurement of production wafers, as well as test and blanket wafers, independent of substrate size or material. |
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