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XRL
(redirected from X-ray lithography)

    Also found in: Encyclopedia, Wikipedia 0.01 sec.
AcronymDefinition
XRLX-Ray Lithography
XRLX-Ray Laser
XRLExtended Range Lance
XRLExecutable Rule Language


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? References in periodicals archive
The MIT group used a technique called X-ray lithography, which is not yet widespread in industry (SN: 11/8/97, p.
Holey device traps light for lasers, filters by Wu, C. / Science News
The review is held annually to demonstrate the accomplishments of the collective JMAR divisions on tasks ranging from x-ray lithography and x-ray point source systems, to advanced inspection methods and materials development.
JMAR Concludes NAVAIR Program Technical Review by Business Wire
X-ray lithography has been under development even longer than EUV technology.
Fine lines for chips: competing technologies for downsizing the ... by Peterson, Ivars / Science News
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