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XRR

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AcronymDefinition
XRRX-Ray Reflectometry
XRRXML Registry/Repository (IBM Websphere)


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This second-generation platform from Jordan Valley offers three metrology channels on the system, XRR (X-Ray Reflectivity), XRF (X-Ray Fluorescence) and SAXS (Small Angle X-Ray Scattering) for high-speed, non-destructive characterization of all film types.
Jordan Valley Secures Multi-Million Dollar Order for New ... by Business Wire
The project will concentrate on SAXS performance improvements on high scatter samples and XRR improvements on ultra thin films (below 30 angstroms).
Jordan Valley to Introduce a Fast Wide Angle Micro-XRD Metrology Tool ... by Business Wire
As Copper metallization and new ultra-thin metal film stacks become commonplace in the semiconductor manufacturing world, the XRR technology employed in the Meta-Probe X is the preferred metrology technique for making critical process control measurements in the fab, thereby enhancing yield," said Dr.
Therma-Wave, Inc. Ships First Copper, Thin Metal Film Thickness ... by Business Wire
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