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ZMI |
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ZYGO has now won 10 R&D 100 Awards, for products including the NewView in 1994, ZMI in 1997, and MESA in 1998. The KMS100(TM) also features a new high resolution positioning stage incorporating ZYGO's ZMI 510 High Stability Plane Mirror Interferometer and planar optics, and new Zygo proprietary optical proximity effect (OPE) correcting algorithms, to deliver the optical resolution, linearity, and precision necessary for measuring subwavelength features on advanced reticles. Zygo Corporation (NASDAQ: ZIGO) ZYGO Corporation, the technology leader in Displacement Measuring Interferometry, announced today the introduction of the ZMI 4004 measurement electronics at Semicon Japan 2001. |
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