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scCO2 |
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ScCO2 is likely to provide the semiconductor industry with an integrated solution for the post-etch residue cleaning and the drying of porous low-k materials. ScCO2 technology is likely to enable the semiconductor industry with an integrated solution for the post-etch residue cleaning and the drying of porous low-k materials. The application of scCO2 for all process steps where the use of water needs to be avoided will be assessed. |
scCO2 |
SCCLL SCCLR SCCLS SCCLT Sccm Sccm SCCMA SCCMAS SCCMC SCCMCB SCCmec SCCMH SCCMHA SCCMHD SCCMP SCCMS SCCMUA SCCN SCCNE SCCNEP SCCNFP SCCNH SCCNM SCCNMS SCCO scCO2 SCCoASCCOAH SCCOBA SCCOC SCCOE SCCOG SCCON SCCoNJ SCCoO SCCOOS SCCOP SCCOPE SCCOPOL SCCOPRF SCCOR SCCOSH SCCOT SCCP SCCP SCCP Connectionless Control SCCP Management SCCP User Adaptation Layer SCCPA SCCPC SCCPCH | |||||
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