CD-SEMCritical Dimension - Scanning Electron Microscopy
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Semiconductor manufacturers require CD-SEM measurement systems to measure the critical dimension of the miniature-sized circuits in a semiconductor and to assure accuracy in manufacturing, Advantest said.
"Traditional CD-SEM systems lack the sensitivity to measure small variations in line and contact hole profiles.
The CD-SEM systems, which can cost from $1.5 to $2.5 million, can earn a high rate of return by quickly solving potential problems in the manufacturing process.
The final report for a one-year project to apply a model-based library (MBL) method to measurements performed with critical dimension scanning electron microscopes (CD-SEMs) has been submitted to International SEMATECH.
The value of nano-tips as replacement electron sources in production field emission critical dimension scanning electron microscopes (CD-SEMs) is being explored in a two-part study for ISEMATECH.