CD-SEM - What does CD-SEM stand for? The Free Dictionary
References in periodicals archive
Semiconductor manufacturers require CD-SEM
measurement systems to measure the critical dimension of the miniature-sized circuits in a semiconductor and to assure accuracy in manufacturing, Advantest said.
systems lack the sensitivity to measure small variations in line and contact hole profiles.
Nanolithography system consisting of Electron Beam Exposure System and CD-SEM
electron beam exposure system - equipment for the exposure of electron beam resists at wafer level for MEMS / NEMS and nanoelectronics.