CDSEMCenter for Doctoral Studies in Economics and Management (Germany; University of Mannheim)
References in periodicals archive ?
Schlumberger Verification Systems recently introduced the revolutionary Yosemite(TM) Ultra Low Voltage(TM) CDSEM and supplies critical dimension and overlay registration tools to the semiconductor industry.
Schlumberger Verification Systems, a supplier of Overlay and CD metrology systems, introduced today Yosemite(TM), the world's first CDSEM that is capable of measuring below 200eV in full automation.
Product development included the most complete e-beam modeling undertaken for a CDSEM to create a unique design allowing for measurements as low at 100eV and to ensure outstanding long term stability and collection efficiency.