CDSEMCenter for Doctoral Studies in Economics and Management (Germany; University of Mannheim)
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For its development and process control needs under 10 nm, leti must update its verity 4i + cdsem. the equipment will have to work automatically with 200 and 300 mm substrates.
Contract notice: Cdsem (critical dimension scanning electron microscpy)
Programs for research and development in micro and nanoelectronics, CEA / LETI seeking to acquire equipment, CDSEM (Critical Dimension Scanning Electron Microscpy) to perform dimensional measurements can be less than 10 nm.