The C4F8 (passivation gas) portion of the DRIE
cycle protects the sidewalls from excessive flare of the channel, but may have not prevented excessive reactivity during completion of the DRIE
Tegal has sold to SPTS the Tegal 200, 110, 3200 and 4200 series DRIE
products, together with its Compact and Pluto development assets, intellectual property and process know-how.
applications: MEMS, Advanced Packaging, Power Devices
The sale of the DRIE
product lines to SPTS represents another major step in Tegal's transformation.
Fraunhofer IMS is well-known for technological leadership in integrated microsystems, and we are very pleased to have received this important silicon DRIE
tool order," said Jim Apffel, DRIE
Product Manager at Tegal Corporation.
For silicon DRIE
, these challenges include achieving higher etch rates, along with tighter control of tilt angles and etch profiles, and better etch depth uniformity across 200-mm wafers.
The Tegal 3200 SE cluster tool silicon DRIE
process module order from this repeat Tegal DRIE
customer follows the successful installation, process qualification, and sustained use of silicon Deep Reactive Ion Etch processes on the customer's first Tegal 3200 SE cluster tool PM.
Tegal Corporation, (Nasdaq:TGAL) an innovator of specialized production solutions for the fabrication of advanced MEMS, power ICs and optoelectronic devices, today announced it has received an order for a Tegal 200 SE[TM] DRIE
tool from a leading Asia Pacific-based Research and Development institution investigating MEMS and associated technologies.
Additional Tegal Silicon DRIE
Process Module Needed by Customer for High-Volume MEMS and Power IC Manufacturing Ramp
Tegal 110 S/DE Tool for Silicon and Dielectric DRIE
Will Be Used to Develop Actuators for Biomedical Applications, Chemical and Biological Sensors, and Advanced Power Devices
Tegal Corporation, (Nasdaq:TGAL) an innovator of specialized production solutions for the fabrication of advanced MEMS, power ICs and optoelectronic devices, announced today it has appointed veonis Technologies GmbH, Puchheim, Germany, as its agent for silicon DRIE
and dielectric DRIE
products in Germany.
systems are critical enablers for etching silicon and dielectric films found in the MEMS, bio-tech, power IC, optoelectronic, and 3D-IC markets.