DRIE


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Related to DRIE: drive, calendar
AcronymDefinition
DRIEDisability Rent Increase Exemption (est. 2005; New York)
DRIEDrinking-Related Internal-External (scale)
DRIEData Recovery Information Exchange (Canada)
DRIEDepartment of Regional Industrial Expansion (Canadian)
DRIEDeep Reactive Ion Etching
DRIEDismantling Racism Institute for Educators (National Conference for Community and Justice)
References in periodicals archive ?
The C4F8 (passivation gas) portion of the DRIE cycle protects the sidewalls from excessive flare of the channel, but may have not prevented excessive reactivity during completion of the DRIE process.
Tegal has sold to SPTS the Tegal 200, 110, 3200 and 4200 series DRIE products, together with its Compact and Pluto development assets, intellectual property and process know-how.
The sale of the DRIE product lines to SPTS represents another major step in Tegal's transformation.
Fraunhofer IMS is well-known for technological leadership in integrated microsystems, and we are very pleased to have received this important silicon DRIE tool order," said Jim Apffel, DRIE Product Manager at Tegal Corporation.
For silicon DRIE, these challenges include achieving higher etch rates, along with tighter control of tilt angles and etch profiles, and better etch depth uniformity across 200-mm wafers.
The Tegal 3200 SE cluster tool silicon DRIE process module order from this repeat Tegal DRIE customer follows the successful installation, process qualification, and sustained use of silicon Deep Reactive Ion Etch processes on the customer's first Tegal 3200 SE cluster tool PM.
Tegal Corporation, (Nasdaq:TGAL) an innovator of specialized production solutions for the fabrication of advanced MEMS, power ICs and optoelectronic devices, today announced it has received an order for a Tegal 200 SE[TM] DRIE tool from a leading Asia Pacific-based Research and Development institution investigating MEMS and associated technologies.
Additional Tegal Silicon DRIE Process Module Needed by Customer for High-Volume MEMS and Power IC Manufacturing Ramp
Tegal 110 S/DE Tool for Silicon and Dielectric DRIE Will Be Used to Develop Actuators for Biomedical Applications, Chemical and Biological Sensors, and Advanced Power Devices
Tegal Corporation, (Nasdaq:TGAL) an innovator of specialized production solutions for the fabrication of advanced MEMS, power ICs and optoelectronic devices, announced today it has appointed veonis Technologies GmbH, Puchheim, Germany, as its agent for silicon DRIE and dielectric DRIE products in Germany.
Tegal's DRIE systems are critical enablers for etching silicon and dielectric films found in the MEMS, bio-tech, power IC, optoelectronic, and 3D-IC markets.