Sanchez-Amores et al., "Deep reactive ion etching
and focused ion beam combination for nanotip fabrication," Materials Science and Engineering C, vol.
[15.] Chen, K.-S., et al., "Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching
(DRIE)," Journal of Microelectromechanical Systems, Vol.
The researchers have already manufactured a 4-millimeter-diameter radial inflow turbine wheel from silicon using deep reactive ion etching
- a relatively new micro-fabrication method, according to Epstein.
The five new achievements were a device to determine specific area (BET) of nanomaterials with the ability to characterize nanostructured materials, deep reactive ion etching
(DRIE) device with the ability to create vertical and deep micrometric and nanometric structures, capillary electrophoresis device with the ability to quantitatively and qualitatively detect medicine, animal spectroscopy device (HiReSPECT) with the ability to take images from small animals, and Sinadoxosome nanomedicine.
Each one of the three array types is fabricated from silicon using deep reactive ion etching
. The fiber array is constructed by boring 125-[micro]m dia holes in a precise pattern in a silicon block.
Summary: TEHRAN (FNA)- The researchers at Tose-e-Hesgar-Sazan-Asia Company managed to design and construct 'Deep Reactive Ion Etching
Device' which is able to act as an environmentally-sustainable system by using H2 and O2 instead of a sort of polymer utilized in its foreign rivals.
The device for the determination of specific area of nanomaterials (BET) , (Deep Reactive Ion Etching
(DRIE) with the ability to create micrometric and nanomteric structures in vertical and deep forms was presented, while capillary electrophoresis instrument with the ability to quantitatively and qualitatively identify drugs and animal spectroscopy device (HiReSPECT) with the ability to take images from small animals were introduced in Iran Nano 2011 Exhibition.
* Deep reactive ion etching
(DRIE) Chemical-mechanical polishing (CMP)