EFTEMEnergy-Filtering Transmission Electron Microscopy
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Caption: FIGURE 7: EFTEM cross section of a Ti/Hf[O.sub.x]/TiN junction after CMP.
Grandjean et al., "Morphology and structure of Cu[O.sub.x]/Ce[O.sub.2] nanocomposite catalysts produced by inert gas condensation: an HREM, EFTEM, XPS, and high-energy diffraction study," Chemistry of Materials, vol.
As a complementary technique, energy-filtered transmission electron microscopy (EFTEM, Zeiss Libra 120) was employed for electron spectroscopic imaging (ESI) on the samples to obtain specific and improved elemental information of the nanostructures.
The intrapulmonary distribution of deposited particles was analyzed immediately or 24 hr after the end of exposure, using energy-filtering transmission electron microscopy (EFTEM) to allow elemental microanalysis of individual particles (Kapp et al.
Carl Zeiss SMT LIBRA[R] Energy Filtering Transmission Electron Microscopes (EFTEM) combine state-of-the-art electron optics with unique Koehler illumination, OMEGA In-column energy filtering, extremely stable digital electronics and genuine ease-of-operation through the WinTEM[TM] graphical user interface (GUI).
The LIBRA[R] 200 FE is the first EFTEM combining the new In-column corrected OMEGA energy filter, the unique Koehler illumination, and a highly efficient field emission emitter.