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Figure 3 shows the 2[theta]-[omega]-scan HRXRD pattern of (0002) peaks of the AlInN/GaN samples.
Based on the HRXRD measurements results, we observed that the mosaic structures parameters, lateral and vertical coherence lengths, tilt and twist angle, and heterogeneous strain of the AlInN epilayers were not strongly affected by indium content (x) in [Al.sub.1-x][In.sub.x]N epilayers.
JVS continues to evolve the company's HRXRD product line, which it acquired from Bede in 2008, with the addition of the new tool.
Isaac Mazor, JVS's president and CEO, said: "The new QC3(TM) HRXRD production tool demonstrates JVS's commitment to LED manufacturing metrology solutions that meet and exceed our customers' technical and cost of ownership expectations."
The analysis is performed through RADS, the oldest and still the best HRXRD analysis package, which has been proven in industry and academic institutions alike.
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- Hryniewiecki, Jerzy