ISSYSIntegrated Sensing Systems
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Next, ISSYS shipped a number of bonded wafer pairs to the applications laboratory at Sonoscan.
Voids between bonded wafers can vary tremendously in area, and the ISSYS engineers were concerned that a void could cause a U-tube to leak.
The acoustic microscopes in the Sonoscan lab are capable of resolving voids down to 5 microns in diameter, which matched the smallest voids that ISSYS was interested in.
Founded in 1995 by leaders in micro-electromechanical (MEMS) technology, ISSYS is one of the oldest independent MEMS companies in the U.S.
ISSYS is currently developing small methanol concentration sensors, targeting the active direct methanol fuel cell (DMFC) market.
The success spawned the creation of the ISSYS subsidiary, NanoGetters, which Sparks now heads.
As with any other medical technology, the Food & Drug Administration (FDA) is in the process of reviewing the ISSYS MEMS-based sensors for the medical market but Spark notes that it is a challenge he and his team are solving.
Weighing a total of 80 kg, the Issys does not only detect an incoming missile to throw all manner of flares at it, but is also able to detect its actual firing--a feature any pilot can only be grateful for when one knows that upon detection of a missile, reaction time is a precious little 2.5 seconds.
In a strange twist of events given the development of the Issys, Ruag is investigating the possibilities of using special infrared flares to enable gunners to train in conjunction with missile detection-equipped aircraft.
According to ISSYS, the sensors are based on micro electromechanical system (MEMS) technology -- a microfluidic technology which, the company says, offers advantages in system and sample size, cost and reliability over current approaches to fluidic density, methanol concentration and chemical concentration measurement.
ISSYS noted that it is both developing its own products and working with Japan's Kyoto Electronics Manufacturing Company (KEM) on another version of the device.
To maximize the impenetrability and durability of the vacuum sealing, both glass bonding and frit sealing are employed at ISSYS. The reliability of this type of sealing is high since even after 13,000 hr, leaks were not detected when 46 parts were stored at 95[degrees]C temperature.