LCVDLaser Chemical Vapor Deposition
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In LCVD, the part is heated not quite high enough for the deposition reaction to take place.
According to Rosen, LCVD would allow metals and ceramics to be deposited on the microscale to build three-dimensional MEMS.
Rosen said that research into using LCVD to make three-dimensional MEMS has been going on at Georgia Tech for four years, and that it is still a long-term goal.