MEVVA

AcronymDefinition
MEVVAMetal Vapor Vacuum Arc
References in periodicals archive ?
High purity Ti foils were cleaned in a mixture of hydrofluoric acid, nitric acid, and purified water for 5 minutes and then implanted with Ti ions at an accelerate voltages of 20 kV, to the fluence of 3 x [10.sup.17] ions/[cm.sup.2] using a metal vapor vacuum arc (MEVVA) ion source implanter.
Silver ion implantation was performed using an ion implantation machine equipped with a metal vapor vacuum arc (MEVVA) ion source.
Delplanke, University Libre de Bruxelles; and "High-quality semiconductor carbon-doped [beta]-Fe[Si.sub.2] film synthesized by MEVVA ion implantation," X.