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It can be foreseen that micro-opto-electro-mechanical accelerometers will play a significant role in the applications in medium and high precision inertial field in the future.
Lab4MEMS II focuses on Micro-Opto-Electro-Mechanical Systems (MOEMS) that merge MEMS1 with Micro-optics to sense or manipulate optical signals using integrated mechanical, optical, and electrical systems, while the original project maintains its emphasis on developing a pilot line for next-generation MEMS devices augmented with such advanced technologies as piezoelectric or magnetic materials and 3D packaging.
Incredibly small and extremely reliable, these devices called micro-opto-electro-mechanical systems (MOEMS) integrate optical, electrical and mechanical elements in a package no bigger than a microchip.