PACVD

AcronymDefinition
PACVDPlasma-Assisted Chemical Vapor Deposition
References in periodicals archive ?
These advanced coatings are developed through proprietary bath chemistries and new vacuum-chamber technologies that use PVD, CVD, and PACVD.
Elaborating on the research objectives, he said, "Today, methods such as CVD, PACVD, and PVD are used for deposition of nano-sized titanium nitride.