PEALDPlasma-Enhanced Atomic Layer Deposition
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References in periodicals archive ?
Glukhov, "Biosensor properties of SOI nanowire transistors with PEALD Al2O3 dielectric protective layer," Semiconductors, vol.
(NASDAQ: ASMI) (Euronext Amsterdam: ASM) on Wednesday revealed that it has received multiple system orders for its plasma enhanced atomic layer deposition (PEALD) reactor from a memory customer in Asia and also an order for the 2X nm node with another unnamed memory manufacturer.