PEALDPlasma-Enhanced Atomic Layer Deposition
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Picosun already offers the world-leading advancements in ALD and PEALD tools for single wafers and batch processing, and proprietary roll-to-roll technology for continuous ALD.
ASM Introduces Stellar(TM) 3000 Multi-Chamber PEALD Tool 70
The Paramount platform easily accommodates these complexities with ultra-accurate power control and delivery across the full output range-both on and off 50 ohm-for seamless process transitions in etch, strip, PECVD, HDP-CVD, PVD and PEALD.