RF-PECVDRadio Frequency Plasma-Enhanced Chemical Vapor Deposition
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References in periodicals archive ?
Mobini, "Co-deposition process of RF-Sputtering and RF-PECVD of copper/carbon nanocomposite films," Surface and Coatings Technology, vol.202, no.
Solaymani, "Morphology, optical and electrical properties of Cu-Ni nanoparticles in a-C:H prepared by co-deposition of RF-sputtering and RF-PECVD," Applied Surface Science, vol.
Zhu, "Structure and properties of the DLC films deposited By RF-PECVD process," Journal of Materials Science and Engineering, vol.27, no.2, pp.190-194, 2009 (Chinese).