SCDS - What does SCDS stand for? The Free Dictionary
References in periodicals archive
In tests at Hitachi Works in Hitachi City, Japan, the manufacturing site for the SCDS
; 3100 ppm of C5F8 were introduced into the SCDS
system where it was reduced to less than 0.
produces less waste and has a lower cost of ownership than any reclaim, combustion or chemical conversion methods currently available.
The Hitachi SCDS
can remove or abate exhaust gases and materials from the semiconductor manufacturing process with high efficiency and contribute significantly to the semiconductor industry goals.