TDMATTetrakis Dimethylamino Titanium
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Figure 2 depicts the normalized concentration profiles for a 2 s TDMAT pulse and a 2.5 s water pulse with respect to time.
Figure 3 depicts the trailing edge of both TDMAT and water concentration profiles compared against a simple exponential decay model.
Agreement between the model and the measurement results for water is much better than that for TDMAT. This difference is likely the result of TDMAT being more efficiently entrained in the carrier gas flow due the smaller diffusion coefficient of TDMAT relative to water, resulting from the larger collision diameter and mass of TDMAT.