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The TMDSO monomer (Sigma Aldrich, grade 97%), premixed with oxygen (grade [greater than or equal to]99.5), was introduced in the CRNP through a coaxial injector.
4) which is characteristic of the Si--H stretching bond in TMDSO (13), giving evidence of the H ablation by atomic nitrogen attack (12).
For the first time in literature, a polymer plasma TMDSO film was deposited through the whole surface of a stainless steel foam by a plasma assisted polymerization process.