TRXRFTotal Reflection X-Ray Fluorescence
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Because TRXRF can accurately quantify trace elements in a variety of materials, such as semiconductors, much more sensitively than the more popular WDXRF and EDXRF systems.
The TRXRF method directs a collimated beam from an x-ray tube onto a sample below the critical angle, resulting in a total reflection of the x-rays and their excitation levels off the surface of the sample.
What has hindered TRXRF sales in the past is that the technique is limited to solids or thin films, and thus did not have numerous applications.