VFEIVirtual Factory Equipment Interface (semiconductor manufacturing systems)
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According to Asyst, the unparalleled number of VFEI drivers was an important factor in its decision to acquire Radiance.
By establishing a baseline of functionality, like VFEI, this module supports substantial application code reuse for controlling various types of manufacturing equipment.
Fully VFEI, SECS and GEMMS-compliant, WorkStream DFS consists of three key servers: a Quality Server for quality analysis, a Recipe Management Server for context-sensitive recipe management, and a Station Controller for fast automation implementation.