After XAES measurements, the stress of the a-C films was measured using the "bending beam technique" using the radius of curvature of film/substrate composite obtained by the deflection of a He-Ne laser beam.
Figure 2(a) shows XAES spectra, as collected, with the background extracted by using the Shirley Model .
The XAES technique permitted the observation of the influence that stress causes to the density of states.
Luches, "XAES and XPS study of amorphous carbon nitride layers," Applied Surface Science, vol.
Serov, "CNx film characterization by surface sensitive methods: XPS and XAES," Diamond and Related Materials, vol.
Okotrub, "XAES study of carbon fluoride and carbon materials," Journal of Electron Spectroscopy and Related Phenomena, vol.
Caption: Figure 2: (a) XAES KVV spectra of carbon films.